Industrial is such a diverse genre that it would be hard to give good advice w/o knowing what you're after exactly.
For all I care you could just have a bunch of guitar stomboxes a couple of contact mics and a drum machine, and you'd be good to go if you were doing some noise/powernoise and such.
For EBM, I'd say you could do well with some VSTis and something like Ableton Live to jam live.
If you have the money for something like a Motif, I'd strongly recommend the Kurzweil Kxxx series keyboards instead as the VAST synthesis engine is far more capable of creating some far out deranged and harsh sounds. In fact I'd say that harshness comes rather easily with VAST, far more easily than anything else out there. And it's sequencer, Setups and Live Mode (if you have the sampling option) would make a very stable solo live rig.